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    Jae-Woong Jeong.
    Optical MEMS (Micro-Electro-Mechanical Systems) is an enabling technology that realizes miniaturized optical systems with high functionality and excellent performance. In this dissertation, two novel miniaturized optical systems are presented for applications in optical communication and biomedical imaging. In Part I, a multi-functional MEMS tunable optical filter are described, which is a key element for dynamic wavelength provisioning in reconfigurable optical networks and communication systems. This filter is built based on MEMS platform technology that allows large vertical mirrors (311 [mu]m x 450 [mu]m x 40 [mu]m) to be micro-assembled on actuated platforms to enable compact tunable optical filters with large apertures and high-quality optical mirrors with very low scattering losses. Besides, electrostatic combdrive actuators connected to the MEMS platforms provide independent and continuous control of the center wavelength and the optical bandwidth. The filter has been tested by integrating it in a 10Gb/s communication system. The performance of the MEMS tunable filter is demonstrated for amplified spontaneous emission (ASE) rejection and wavelength selection. In PART II, a 3-D MEMS scanning system utilizing 2-D lateral and 1-D vertical MEMS scanners is introduced for use in miniature in vivo dual-axis confocal (DAC) microendoscopes, which is an emerging biomedical-imaging technology with high resolution, good tissue penetration, large field of view, and ability to provide both reflectance and fluorescence contrast images. Both MEMS scanners are fabricated exclusively by front-side processing to enable compact and robust structures that facilitate handling and packaging for miniaturized optical instrumentation. Co-operation of a 2-D lateral scanner and a 1-D vertical scanner enables fast 3-D microscopy over a volume that measures 340[mu]m by 236[mu]m by 286[mu]m. This part describes the principle of the all-MEMS-based 3-D scanning DAC microscopy that gives the functionality of OCT (real-time vertical cross-section imaging) to a confocal microscope.
    Digital Access   2012